Email :  li.xinghui@sz.tsinghua.edu.cn

Phone :  0755-26032544

Office Loction :  Room A917, Phase I Building of Tsinghua SIGS

During the past five years, I work on two areas for fulfilling requirements on precision and intelligence of advanced manufacturing, they are, precision metrology & instruments and intelligent production technologies & equipment. Six platforms are constructed, including holographic lithography enabled advanced grating fabrication, grating interferometry, chromatic confocal sensing, rapid and precision structured light enabled 3D reconstruction, SLAM for AGV, and artificial intelligence (AI) based automatic optical inspection (AOI). More than 60 peer-reviewed articles and proceedings about abovementioned areas were published, more than 20 patents were filed/granted, research fundings with a total amount of more than 15 million RMB were granted for supporting on platform construction, students training as well as technicians recruitment. There are 21 members graduating from or worked in my group, they are, 1 post-doctor, 2 doctors, 18 masters.

Contributions of my research group can be categorized into six directions. Firstly, polarization manipulation enabled holographic lithography technique firstly proposed in my group allows fabrication of large area micro-nano structure array with high uniformity and periodic tunability, which greatly benefits today’s nano science and technology. Secondly, a hybrid planar grating with mixed coding firstly developed in my group brings an outstanding grating interferometric solution that owns advantages on multi-DOF, sub-nanometric, absolute and large stroke simultaneously. This is a proven prior choice for the most advanced positioning solution for lithography machine. Thirdly, in the chromatic confocal area, we completely solved the problem caused by reflectance variation of target surface and spectrum distribution imperfection existing in the light source by using a modified interpolation optical configuration and a self-reference strategy. Fourth, aiming for improvement of intelligence and flexibility in production process, we developed SLAM based AGV with sensing integration of vision, points cloud by Lidar and initial guiding IMU unit. Fifth, we proposed high precision target reconstruction via FPGA controlled MEMS mirror structured light system for a highly reliable and dynamic detection and positioning for various industrial robots. Lastly, we focused on transfer learning and deep learning techniques for highly efficient and accurate AOI application for many industrial situations. These outbreaking innovations and integration applications have been being employed in and are playing a significant role on advanced manufacturing of China.

1.Jiao Bai, Jingwen Li, Xiaohao Wang, XinghuiLi*. Research Progress of high precision chromatic confocal displacement measurement technology[J]. Laser & Optoelectronics Progress, 2023, 60(3): 221-236.

2. GaopengXue, LiyuLin, QihangZhai, ChuangZeng, XiaohaoWang, XinghuiLi*. Development of dielectric-film-based polarization modulation scheme for patterning highly uniform 2D array structures with periodic tunability[J]. Optics and Lasers in Engineering,2023,167: 107627.

3. Shengtong Wang, Baiqi Liao, Ningning Shi, XinghuiLi*. A compact and high-precision three-degree-of-freedom grating encoder based on a quadrangular frustum pyramid prism[J]. Sensors, 2023, 23(8): 4022.

4. Chen Li, Haoxin Yan, Xiang Qian, Shidong Zhu, Peiyuang Zhu, Chengwei Liao, Haoyang Tian, Xiu Li, Xiaohao Wang, XinghuiLi*. A domain adaptation YOLOv5 model for industrial defect inspection[J]. Measurement, 2023, 213: 112725.

5. Min Han, Fengxiao Lei, Weijian Shi, Shihao Lu, XinghuiLi*. Uniaxial MEMS-based 3D reconstruction using pixel refinement[J]. Optics Express, 2023, 31(1): 536-554.

6. Shengtong Wang, Linbin Luo, Junhao Zhu, Ningning Shi, XinghuiLi*. An ultra-precision absolute-type multi-degree-of-freedom grating encoder[J]. Sensors, 2023, 22(23): 9047.

2023/01-present, Chief Guest Editor, Special Issue on Machine Learning in Precision and Micro/Nano Metrology in Journal Nanomanufacturing and Metrology (NMME). 

2022-present, Secretary, Young Scientists Committee of International Society of Nanomanufacturing.

2022/08/30-2022/09/01, Organizing Committee Member, Senssion Chair of nanoMAN2022 and AETS2022, online.

2022/12/16-2022/12/17, Co-Chair, 2022 ISNM Symposium on Non-Conventional Manufacturing, Changchun, China.

2022/09/23-2022/09/25, Co-Chair, 2022 ISNM Symposium on Measurement Technologies, Chongqing, China. 

2021/11/17-2021/11/19, Session Chair, the 7th International Conference on Nanomanufacturing, Xi’an, China.

2021/01-2023/12, Director, Tsinghua SIGS-Nanning Joint Research Center for Intelligent Manufacturing.

2020-present, Committee Member, Advanced Manufacturing Branch of CPC Tsinghua SIGS Committee.

2019/09/01-2019/09/04, Session Chair, the 14th International Symposium on Measurement Technology and Intelligent Instrument (ISMTII 2019), Niigata, Japan.

2019-present, Secretary, Steering Committee of Instrument Engineering Master’s Degree of Tsinghua University.

2018-present, Secretary, Defense Committee of Instrument Engineering Master’s Degree of Tsinghua University.

2018/08/08-2018/08/10, Session Chair, the 10th International Symposium on Precision Engineering Measurements and Instrumentation (ISPEMI 2018), Kunming, China.

2018/01-present, Editorial Board Member of SCI-indexed Journal IJPEM. 

2023.04 Silver medal at the Salon International des Inventions in Geneva

2023.01 Silver medal at the Paris International Exhibition of Inventions

2022.11 Guangdong province postgraduates academic forum Best Oral Presentation

2022.09 Top 100 projects of strategic emerging Industrial clusters in the Guangdong-Hong Kong-Macao Greater Bay Area High Value Patent Cultivation Layout Competition

2022.09 The 8th International Conference on Nanomanufacturing & The 4^th AET Symposium on ACSM and Digital Manufacturing Best Paper Award.

2022.01 Outstanding Contribution Award, International Journal of Nanomanufacturing and Metrolgoy (NNME)

2021.06 Excellent Communist in Tsinghua Shenzhen International Graduate School, Tsinghua University

2021.06 Supervision of Excellent Master Degree Thesis of Tsinghua University

2021.04 The 16th IEEE International Conference on Nano/Micro Engineering & Molecular System Best Conference Paper Award

2020.07 Excellent Award, Excellent Teacher in On-line Teaching under COVID-19

2019.06 Excellent Communist of Tsinghua Shenzhen International Graduate School, Tsinghua University

2017.03 Highly Cited Research Elsevier

2016.12Excellent Post-doctorTsinghua University

2015.03 Tohoku President’s Award, Tohoku University

2012.12 Excellent Speech, Japan Society of Precision Engineering

2011.06 MonbukagakuSho Scholarship Japan Government

2009.10 Excellent Student Scholarship Japan Government

2008.06 Excellent Graduate, Wuhan University

2008.06 Excellent Communist,Wuhan University

2007.05 First Prize of Science and technology competition in Wuhan University

2007.12 ASML Scholarship ASML

2006.06 Third Prize of Science and technology competition in Hubei Province